Deterministic Micro Asperities on Bearings and Seals Using a Modified LIGA Process

[+] Author and Article Information
L. S. Stephens, R. Siripuram, M. Hayden, B. McCartt

Bearing and Seals Laboratory, University of Kentucky, 151 Ralph G. Anderson Building, Lexington, KY 40506

J. Eng. Gas Turbines Power 126(1), 147-154 (Mar 02, 2004) (8 pages) doi:10.1115/1.1619430 History: Received December 01, 2001; Revised March 01, 2002; Online March 02, 2004
Copyright © 2004 by ASME
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Thrust ring (28.6 mm OD) with hex asperities
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LIGA microfabrication process
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(a) PMMA template used for electroplating process; (b) electroplated nickel hexagonal asperities (550 μm avg diameter, 165 μm edge-to-edge, 14 μm tall)
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(a) SEM detail of hexagonal micro asperity, (b) 800 nm wide scratch on asperity land
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Exp. friction coefficients (7 μm tall asperities)
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Exp. friction coefficient versus asperity height
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Asperity pattern and isobars
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Pressure distribution over unit cell
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Theoretical friction coefficient for 7 μm height




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