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TECHNICAL PAPERS: Gas Turbines: IGTI Scholar Lecture

Millimeter-Scale, Micro-Electro-Mechanical Systems Gas Turbine Engines

[+] Author and Article Information
Alan H. Epstein

Gas Turbine Laboratory, Massachusetts Institute of Technology, Cambridge, MA 01239e-mail: Epstein@mit.edu

J. Eng. Gas Turbines Power 126(2), 205-226 (Jun 07, 2004) (22 pages) doi:10.1115/1.1739245 History: Received October 01, 2002; Revised March 01, 2003; Online June 07, 2004
Copyright © 2004 by ASME
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References

Gerendas, M., and Pfister, R., 2000, “Development of a Very Small Aero-Engine,” ASME Paper 2000-GT-0536.
Nakajima, T., Fukikawa, Y., Goto, T., and Iio, M., 1995, “The Development of the Micro Gas Turbine Generator,” 1995 Yokohama International Gas Turbine Congress, Yokohama, Japan.
Senturia, S., 2001, Microsystem Design, Kluwer Academic Publishers, Boston, MA.
Jensen,  K. F., 2001, “Microreaction Engineering—Is Small Better?” Chem. Eng. Sci., 56, pp. 293–303.
Epstein,  A. H., and Senturia,  S. D., 1997, “Macro Power From Micro Machinery,” Science, 276, p. 1211.
Epstein, A. H., Senturia, S. D., Al-Midani, O., Anathasuresh, G., Ayón, A., Breuer, K., Chen, K.-S., Ehrich, F. E., Esteve, E., Fréchette, L., Gauba, G., Ghodssi, R., Groshenry, C., Jacobson, S., Kerrebrock, J. L., Lang, J. H., Lin, C.-C., London, A., Lopata, J., Mehra, A., Mur Miranda, J. O., Nagle, S., Orr, D. J., Piekos, E., Schmidt, M. A., Shirley, G., Spearing, S. M., Tan, C. S., Tzeng, Y.-S., and Waitz, I. A., 1997, “Micro-Heat Engines, Gas Turbines, and Rocket Engines,” Paper No. AIAA 97-1773.
Groshenry, C., 1995, “Preliminary Design Study of a Micro-Gas Turbine Engine,” M.S. thesis, MIT Department of Aeronautics and Astronautics, MIT, Cambridge, MA.
Park, D.-E., Lee, D.-H., Yoon, J.-B., Kwon, S., and Yoon, E., 2002, “Design and Fabrication of Micromachined Internal Combustion Engine as a Power Source for Microsystems,” Technical Digest of MEMS 2002, 15th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, NV, IEEE, Piscataway, NJ, pp. 272–275.
Jacobson, S. A., 1998, “Aerothermal Challenges in the Design of a Microfabricated Gas Turbine Engine,” AIAA 98-2545, 29th AIAA Fluid Dynamics Conference, Albuquerque, NM.
Spearing,  M. S., 2000, “Materials Issues in Microelectro-Mechanical Systems (MEMS),” Acta Mater., 48, pp. 179–196.
Hawthorne,  W. R., 1994, “Reflections on United Kingdom Aircraft Gas Turbine History,” ASME J. Eng. Gas Turbines Power, 116, pp. 495–510.
Madou, M., 1997, Fundamentals of Microfabrication, CRC Press, Boca Raton, FL.
Ayón, A. A., Lin, C. C., Braff, R., Bayt, R., Sawin, H. H., and Schmidt, M., 1998, “Etching Characteristics and Profile Control in a Time Multiplexed Inductively Coupled Plasma Etcher,” 1998 Solid State Sensors and Actuator Workshop, Hilton Head, SC.
Lin, C. C., 1999, “Development of a Microfabricated Turbine-Driven Air Bearing Rig,” Ph.D. thesis, MIT Department of Mechanical Engineering, MIT, Cambridge, MA.
Lin, C. C., Ghodssi, R., Ayón, A. A., Chen, D. Z., Jacobson, S., Breuer, K. S., Epstein, A. H., and Schmidt, M. A., 1999, “Fabrication and Characterization of a Micro Turbine/Bearing Rig,” Presented at MEMS ’99, Orlando, FL.
Mirza,  A. R., and Ayón,  A. A., 1999, “Silicon Wafer Bonding for MEMS Manufacturing,” Solid State Technol., 42, pp. 73–78.
Miki, N., Zhang, X., Khanna, R., Ayón, A. A., Ward, D., and Spearing, S. M., 2002, “A Study of Multi-Stack Silicon-Direct Wafer Bonding for MEMS Manufacturing,” Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (MEMS2002), Las Vegas, NV, IEEE, Piscataway, NJ, pp. 407–410.
Mehra,  A., Ayón,  A. A., Waitz,  I. A., and Schmidt,  M. A., 1999, “Microfabrication of High Temperature Silicon Devices Using Wafer Bonding and Deep Reactive Ion Etching,” J. Microelectromech. Syst., 8, pp. 152–160.
Fréchette, L. G., Jacobson, S. A., Breuer, K. S., Ehrich, F. F., Ghodssi, R., Khanna, R., Wong, C. W., Zhang, X., Schmidt, M. A., and Epstein, A. H., 2000, “Demonstration of a Microfabricated High-Speed Turbine Supported on Gas Bearings,” Hilton Head Solid-State Sensor & Actuator Workshop, Hilton Head Island, SC, pp. 43–47.
Ghodssi, R., 2003, private communication.
Mehra, A., Jacobson, S. A., Tan, C. S., and Epstein, A. H., 1998, “Aerodynamic Design Considerations for the Turbomachinery of a Micro Gas Turbine Engine,” Presented at the 25th National and 1st International Conference on Fluid Mechanics and Power, New Delhi, India.
Mehra, A., 1997, “Computational Investigation and Design of Low Reynolds Number Micro-Turbomachinery,” M.S. thesis, MIT Department of Aeronautics and Astronautics, MIT, Cambridge, MA.
Shirley, G., 1998, “An Experimental Investigation of a Low Reynolds Number, High Mach Number Centrifugal Compressor,” M.S. thesis, MIT Department of Aeronautics and Astronautics, MIT, Cambridge, MA.
Fréchette, L. G., 2000, “Development of a Microfabricated Silicon Motor-Driven Compression System,” Ph.D. thesis, MIT Department of Aeronautics and Astronautics, MIT, Cambridge, MA.
Sirakov, B., 2003, private communication.
Isomura, K., Murayama, M., Yamaguchi, H., Ijichi, N., Asakura, H., Saji, N., Shiga, O., Takahashi, K., Kawakubo, T., Watanabe, T., Yamagata, A., Tange, H., Tanaka, S., Genda, T., and Esashi, M., 2002, “Design Study of a Micromachined Gas Turbine With Three-Dimensional Impeller,” Presented at the 9th International Symposium on Transport Phenomena and Dynamics of Rotating Machinery, Honolulu, HI.
Isomura, K., Murayama, M., Yamaguchi, H., Ijichi, N., Asakura, H., Saji, N., Shiga, O., Takahashi, K., Tanaka, S., Genda, T., and Esashi, M., 2002, “Development of Microturbocharger and Microcombustor for a Three-Dimensional Gas Turbine at Microscale,” ASME Paper GT-2002-30580.
Kang, S., Johnston, J. P., Arima, T., Matsunaga, M., Tsuru, H., and Prinz, F. B., 2003, “Micro-Scale Radial-Flow Compressor Impeller Made of Silicon Nitride, Manufacturing and Performance,” ASME Paper GT-2003-38933.
Gong, Y., 2002, private communication.
Philippon, B., 2001, “Design of a Film Cooled MEMS Micro Turbine,” M.S. thesis, MIT Department of Aeronautics and Astronautics, MIT, Cambridge, MA.
Spadaccini, C. M., Mehra, A., Lee, J., Lukachko, S., Zhang, X., and Waitz, I. A., 2002, “High Power Density Silicon Combustion Systems for Micro Gas Turbine Engines,” ASME Paper GT-2002-30082.
Waitz,  I. A., Gautam,  G., and Tzeng,  Y.-S., 1998, “Combustors for Micro-Gas Turbine Engines,” ASME J. Fluids Eng., 120, 109-117.
Mehra,  A., Zhang,  X., Ayón,  A. A., Waitz,  I. A., Schmidt,  M. A., and Spadaccini,  C. M., 2000, “A 6-Wafer Combuston System for a Silicon Micro Gas Turbine Engine,” J. Microelectromech. Syst., 9, pp. 517–527.
Zhang, X., Mehra, A., Ayón, A. A., and Waitz, I. A., 2002, “Development of Polysilicon Igniters and Temperature Sensors for a Micro Gas Turbine Engine,” Technical Digest of MEMS 2002, 15th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, NV, IEEE, Piscataway, NJ, pp. 280–283.
Spadaccini, C. M., Zhang, X., Cadou, C. P., Miki, N., and Waitz, I. A., 2002, “Development of a Catalytic Silicon Micro-Combustor for Hydrocarbon-Fueled Power MEMS,” Technical Digest of MEMS 2002, 15th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, NV, IEEE, Piscataway, NJ, pp. 228–231.
Takahashi, K., Murayama, M., Isomura, K., and Tanaka, S., 2002, “Development of a Methane Fueled Combustor for Micro-Scaled Gas Turbine,” Technical Digest of Power MEMS 2002, Tsukuba, Japan, IEEE, Piscataway, NJ, pp. 44–46.
Matsuo, E., Yoshiki, H., Nagashima, T., and Kato, C., 2002, “Development of Ultra Micro Gas Turbines,” Technical Digest of Power MEMS 2002, Tsukuba, Japan, IEEE, Piscataway, NJ, pp. 36–39.
Mur Miranda, J. O., 1997, “Feasibility of Electrostatic Bearings for Micro Turbo Machinery,” M. Eng. thesis, MIT Department of Electrical Engineering and Computer Science, MIT, Cambridge, MA.
Walton,  J. F., and Hesmat,  H., 2002, “Application of Foil Bearings to Turbomachinery Including Vertical Operation,” ASME J. Eng. Gas Turbine Power, 124, pp. 1032–1039.
Spakovszky, Z. S., 2003, “Scaling Laws for Ultra-Short Hydrostatic Gas Journal Bearings,” 19th Biennial Conference on Mechanical Vibration and Noise, ASME Paper No. DETC2003/VIB-48468.
Breuer, K., Ehrich, F., Fréchette, L., Jacobson, S., Lin, C.-C., Orr, D. J., Piekos, E., Savoulides, N., and Wong, C.-W., 2003, “Challenges for Lubrication in High Speed MEMS,” Nanotribology, Hsu and Ying, eds., Kluwer Academic Press, Dordrecht, The Netherlands.
Liu, L., Teo, C. J., Miki, N., Epstein, A. H., and Spakovszky, Z. S., 2003, “Hydrostatic Gas Journal Bearings for Micro-Turbomachinery,” to be presented at the 19th Biennial Conference on Mechanical Vibration and Noise.
Ehrich,  F. F., and Jacobson,  S. A., 2003, “Development of High Speed Gas Bearings for High-Power-Density Micro-Devices,” ASME J. Eng. Gas Turbines Power, 125, pp. 141–148.
Miki, N., Teo, C. J., Ho, L., and Zhang, X., 2002, “Precision Fabrication of High-Speed Micro-Rotors Using Deep Reactive Ion Etching (DRIE),” Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, SC.
Piekos,  E. S., and Breuer,  K. S., 1998, “Pseudospectral Orbit Simulation of Non-Ideal Gas-Lubricated Journal Bearings for Microfabricated Turbomachines,” ASME Paper No. 98-Trib-48, presented at the Joint ASME/STLE Tribology Conference, Toronto, Canada; also to appear in ASME J. Tribol.
Wong, C. W., Zhang, X., Jacobson, S. A., and Epstein, A. H., 2002, “A Self-Acting Thrust Bearing for High Speed Micro-Rotors,” Technical Digest of MEMS 2002, 15th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, NV, IEEE, Piscataway, NJ, pp. 276–279.
Chen,  K.-S., Ayón,  A., and Spearing,  S. M., 1999, “Controlling and Testing the Fracture Strength of Silicon at the Mesoscale,” to be published in the J. Am. Ceram. Soc.
Moon, H.-S., Anand, L., and Spearing, S. M., 2002, “A Constitutive Model for the Mechanical Behavior of Single Crystal Silicon at Elevated Temperature,” Mater. Res. Soc. Symp. Proc., Materials Research Society, Warrendale, PA, 687 , Paper No. B9.6.
Choi, D., Shinavski, R. J., Steffier, W. S., Hoyt, S., and Spearing, S. M., 2001, “Process Development of Silicon-Silicon Carbide Hybrid Micro-Engine Structures,” Materials Research Society Symposium Proceedings, Materials Research Society, Warrendale, PA, 687 , Paper No. B5.44.
Sugimoto,  S., Tanaka,  S., Li,  J.-F., Watanabe,  R., and Esashi,  M., 2000, “Silicon Carbnide Micro-Reaction-Sintering Using a Multilayer Silicon Mold,” IEEE Transducers, pp.775–780.
Spearing, S. M., and Chen, K. S., 1997, “Micro-Gas Turbine Engine Materials and Structures,” Presented at 21st Annual Cocoa Beach Conference and Exposition on Composite, Advanced Ceramics, Materials and Structures.
Chen,  K.-S., Spearing,  S. M., and Nemeth,  N. N., 2001, “Structural Design of a Silicon Micro-Turbo-Generator,” AIAA J., 39, pp. 720–728.
Chen, K.-S., Ayón, A. A., Lohner, K. A., Kepets, M. A., Melconian, T. K., and Spearing, S. M., 1998, “Dependence of Silicon Fracture Strength and Surface Morphology on Deep Reactive Ion Etching Parameters,” Presented at the MRS fall Meeting, Boston, MA.
Harrison, T. S., London, A. P., and Spearing, S. M., 2001, “High Temperature, High Pressure Fluid Connections for Power Micro-Systems,” Mat. Res. Soc. Symp. Proc., Materials Research Society, Warrendale, PA, 657 , p. 654.
Liu, C., 2000, “Dynamical System Modeling of a Micro Gas Turbine Engine,” M.S. thesis, MIT Department of Aeronautics and Astronautics, MIT, Cambridge, MA.
Tang, D., 2001, “Rotor Speed Microsensor for the MIT Microengine,” M.S. thesis, MIT Department of Mechanical Engineering, MIT, Cambridge, MA.
Yang, X., Holke, A., and Schmidt, M. A., 2002, “An Electrostatic, On/Off MEMS Valve for Gas Fuel Delivery of a Microengine,” Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, SC.
Nagle, S. F., and Lang, J. H., 1999, “A Micro-Scale Electric-Induction Machine for a Micro Gas Turbine Generator,” 27th Annual Meeting of the Electrostatics Society of America.
Ghodssi, R., Fréchette, L. G., Nagle, S. F., Zhang, X., Ayón, A. A., Senturia, S. D., and Schmidt, M. A., 1999, “Thick Buried Oxide in Silicon (TBOS): An Integrated Fabrication Technology for Multi-Stack Wafer-Bonded MEMS Processes,” Transducers 99, IEEE, Piscataway, NJ, pp. 1456-1459.
Fréchette, L. G., Nagle, S. F., Ghodssi, R., Umans, S. D., Schmidt, M. A., and Lang, J. H., 2001, “An Electrostatic Induction Micromotor Supported on Gas-Lubricated Bearings,” IEEE 14th International Micro Electro Mechanical Systems Conference, MEMS 2001, Interlaken, Switzerland.
Koser, H., and Lang, J. H., 2000, “Modeling a High Power Density MEMS Magnetic Induction Machine,” Proc. Fourth International Conference On Modeling and Simulation of Microsystems, Hilton Head, SC, Transducer Research Foundation, Cleveland, OH, pp. 286–289.
Park, J. W., Cros, F., and Allen, M. G., 2002, “A Sacrificial Layer Approach to Highly Laminated Magnetic Cores,” MEMS 2002 IEEE International Conference, Las Vegas, NV, IEEE, Piscataway, NJ, pp. 380–383.
Sullivan, S., Zhang, X., Ayón, A. A., and Brisson, J. G., 2001, “Demonstration of a Microscale Heat Exchanger for a Silicon Micro Gas Turbine Engine,” Transducers 01, IEEE Piscataway, NJ, pp. 1606–1609.
Harris,  C., Kelly,  K., Wang,  T., McCandless,  A., and Motakef,  S., 2002, “Fabrication, Modeling, and Testing of Micro-Cross-Flow Heat Exchangers,” J. Microelectromech. Syst., 11, pp. 726–735.
Cui, L., 2003, “Design and System Analysis of Micro-Scale Rankine Cycle Power Systems,” M.S. thesis, MIT Department of Aeronautics and Astronautics, MIT, Cambridge, MA.
Isomura, K., Murayama, M., and Kawakubo, T., 2001, “Feasibility Study of a Gas Turbine at Micro Scale,” ASME Paper 2001-GT-101.
Isomura, K., Murayama, M., Yamaguchi, H., Ijichi, N., Saji, N., Shiga, O., Tanaka, S., Genda, T., Hara, M., and Esashi, M., 2002, “Component Development of Micromachined Gas Turbine Generators,” Technical Digest of Power MEMS 2002, Tsukuba, Japan, IEEE, Piscataway, NJ, pp. 32–35.
London,  A. P., Epstein,  A. H., and Kerrebrock,  J. L., 2001, “A High Pressure Bipropellant Microrocket Engine,” J. Propul. Power, 17, pp. 780–787.
Deux, A., 2001, “Design of a Silicon Microfabricated Rocket Engine Turbopump,” M.S. thesis, MIT Department of Aeronautics and Astronautics, MIT, Cambridge, MA.
Jamonet, L., 2002, “Testing of a Microrocket Engine Turbopump,” M.S. thesis, MIT Department of Aeronautics and Astronautics, MIT, Cambridge, MA.
Pennathur, S., Peles, Y., and Epstein, A. H., 2002, “Cavitation at Micro-Scale in MEMS Fluid Machinery,” ASME Paper IMECE 2002-33328.
Joppin, C., 2002, “Cooling Performance of Storable Propellants for a Micro Rocket Engine,” M.S. thesis, MIT Department of Aeronautics and Astronautics, MIT, Cambridge, MA.
National Research Council, 2002, Implications of Emerging Micro- and Nanotechnologies, The National Academies Press, Washington, DC.
Golley, J., Genesis of the Jet, 1996, Gunston, B., tech. ed., Airlife Publishing, Shrewsbury, England.

Figures

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A 4:1 pressure ratio, 4 mm rotor dia radial inflow turbine stage
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Simplified processing steps to produce the turbine in Fig. 6 in a wafer stack. (Figure courtesy of N. Miki.)
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Simple cycle gas turbine performance with H2 fuel
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Critical temperature change to cause fracture via thermal shock
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H2 demo engine with conduction-cooled turbine constructed from six silicon wafers
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Cutaway H2 demo gas turbine chip
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Si wafer of radial inflow turbine stages
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Simple cycle performance variation for low pressure ratios, π (η=adiabatic efficiency, Tt4=turbine inlet temperature, Tt2=compressor inlet temperature). (Figure courtesy of M. Monroe.)
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Micron-scale counterflow heat exchanger. (Figure courtesy of J. Brisson.)
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A 15 N (3.3 lb) thrust bipropellant liquid rocket engine
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A 2.5 g/sec turbopump rotor (the pump is the inner blade row, the turbine the outer)
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Concept of a MEMS gas turbine engine packaged as a standard military battery
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200 μm high, Si turbine blades new and after 5 hrs at 1600 K gas temperature in a microcombustor exhaust
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Usable strength of Si/SiC/Si hybrid structure in tension. (Figure courtesy of H.-S. Moon.)
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A 50 μm sq hot film RPM and temperature sensor
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A 1 mm dia. fuel control valve on Si beam springs
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Fields and charges in a microscale electric induction motor-generator
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Complete, five-layer turbine “stack” including bearings and fluid plumbing; (a) conceptual cross-section, (b) electron microscope image of cross-section
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Calculated sensitivity of two-dimensional airfoil loss with Reynolds number, 9
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A 500 m/s tip speed, 8 mm dia. centrifugal engine compressor
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Sensitivity of compressor pressure rise to tip clearance (% span)
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The influence of heat addition on compressor performance (pressure ratio is π, the subscript “ad” refers to the adiabatic condition)
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Variation of engine compressor polytropic efficiency with size
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Silicon engine radial inflow turbine inside annular combustor; the flow passages in the NGV’s are for bearing and balance air
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Design space for Si H2 microcombustor
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Measured performance of 0.2 cc, Si microcombustors using H2 fuel
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Measured microcombustor performance as a function of Damkohler number
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Gas bearing radial unit load capacity variation with speed. (Figure courtesy of L. Liu.)
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Gas journal bearing model
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Transcritical response of the micro-journal gas bearing in Fig. 6. (Figure courtesy of C. J. Teo.)
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Geometry of (a) hydrodynamic and (b) hydrostatic thrust bearings (not to scale)
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Hybrid hydrodynamic (spiral grooves) and hydrostatic (orifices) 0.7 mm dia. thrust bearing
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Material properties relevant to high speed, high temperature rotating machinery
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A 131-pole, 6-phase, 4 mm dia. electric induction stator
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A 4-pole stator for a 4 mm dia. magnetic motor-generator. (Figure courtesy of M. Allen.)
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Specific core power versus turbine rotor inlet temperature (after Koff)

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