Topics: Lasers, Semiconductor wafers, Stress, Temperature measurement, Waves, Temperature, Anisotropy, Dispersion relations, Elastic constants, Rapid thermal processing

Topics: Rapid thermal processing, Thin films, Semiconductor wafers, Heating, Reflectance, Temperature, Absorption, Computer simulation, Energy gap, High temperature

Topics: Heating, Rapid thermal processing, Semiconductor wafers, Temperature distribution, Heat, Steady state, Computation, Radiative heat transfer

Topics: Emissivity, Monte Carlo methods, Rapid thermal processing, Simulation, Temperature measurement

Topics: Silicon, Thermal conductivity, Electrons, Equilibrium (Physics), Melting point, Phonons, Heat, High temperature, Irradiation (Radiation exposure), Lasers

Topics: Heating, Rapid thermal processing, Temperature, Errors, Semiconductor wafers, Delays

Topics: Modeling, Pipes, Radiation (Physics), Rapid thermal processing, Thermometers, Errors, Quartz, Signals, Temperature, Manufacturing

Topics: Convection, Heating, Semiconductor wafers, Temperature distribution, Temperature, Heat, Natural convection, Radiation (Physics), Rapid thermal processing, Steady state

Topics: Reflectance, Silicon, Semiconductor wafers, Surface roughness, Coatings, Thin films, Electromagnetic scattering, Instrumentation, Microscale devices, Modeling

Topics: Design, Furnaces, Modeling, Semiconductor wafers, Geometry, Gradient methods, Heat flux, Heat transfer, Heating, Inverse problems

Topics: Nonlinear programming, Optimization, Radiant heating, Temperature, Design, Deformation, Design methodology, Food products, Hardening (Curing), Heat transfer

Topics: Polysilicon, Stress, Thin films, Semiconductor wafers, Compressive stress, Annealing, Boron, Buckling, Pressure, Rapid thermal processing