This paper presents the design and implementation of a positioning system with a dc servomotor and ball-screw mechanism used to realize high-precision positioning over a wide travel range with nanometer level positioning error and near zero overshoot. Instead of the popular dual-model control strategy and friction compensation, a high-gain proportional-integral-derivative controller is used to realize a single-step point-to-point positioning. The controller parameters are obtained by placing closed-loop poles according to the macrodynamics of a ball-screw mechanism only to avoid identification of microdynamics and friction modeling. In order to suppress the overshoot caused by actuator saturation in long-stroke positioning, a trajectory planning method is applied to calculate the input of the closed-loop system. Experimental and simulation results demonstrate that single-step precision positioning responses to different size commands are achieved without producing any large overshoot. In point-to-point positioning from 100 mm down to 10 nm, the positioning error is within 2 nm and the response dynamics is satisfactory.
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e-mail: lihual@hit.edu.cn
e-mail: ycliang@hit.edu.cn
e-mail: yfguo@hit.edu.cn
e-mail: shimo@pi.titech.ac.jp
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March 2010
Research Papers
Design and Testing of a Nanometer Positioning System
Lu Lihua,
Lu Lihua
Center for Precision Engineering,
e-mail: lihual@hit.edu.cn
Harbin Institute of Technology
, Harbin 150001, P.R. China
Search for other works by this author on:
Liang Yingchun,
Liang Yingchun
Center for Precision Engineering,
e-mail: ycliang@hit.edu.cn
Harbin Institute of Technology
, Harbin 150001, P.R. China
Search for other works by this author on:
Guo Yongfeng,
Guo Yongfeng
Center for Precision Engineering,
e-mail: yfguo@hit.edu.cn
Harbin Institute of Technology
, Harbin 150001, P.R. China
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Shimokohbe Akira
Shimokohbe Akira
Precision and Intelligence Laboratory,
e-mail: shimo@pi.titech.ac.jp
Tokyo Institute of Technology
, Kanagawa 226-8503, Japan
Search for other works by this author on:
Lu Lihua
Center for Precision Engineering,
Harbin Institute of Technology
, Harbin 150001, P.R. Chinae-mail: lihual@hit.edu.cn
Liang Yingchun
Center for Precision Engineering,
Harbin Institute of Technology
, Harbin 150001, P.R. Chinae-mail: ycliang@hit.edu.cn
Guo Yongfeng
Center for Precision Engineering,
Harbin Institute of Technology
, Harbin 150001, P.R. Chinae-mail: yfguo@hit.edu.cn
Shimokohbe Akira
Precision and Intelligence Laboratory,
Tokyo Institute of Technology
, Kanagawa 226-8503, Japane-mail: shimo@pi.titech.ac.jp
J. Dyn. Sys., Meas., Control. Mar 2010, 132(2): 021011 (6 pages)
Published Online: February 9, 2010
Article history
Received:
May 23, 2008
Revised:
November 24, 2009
Online:
February 9, 2010
Published:
February 9, 2010
Citation
Lihua, L., Yingchun, L., Yongfeng, G., and Akira, S. (February 9, 2010). "Design and Testing of a Nanometer Positioning System." ASME. J. Dyn. Sys., Meas., Control. March 2010; 132(2): 021011. https://doi.org/10.1115/1.4000811
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