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Keywords: X-ray imaging
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Journal Articles
Hiroyuki Tsuritani, Toshihiko Sayama, Yoshiyuki Okamoto, Takeshi Takayanagi, Kentaro Uesugi, Takao Mori
Journal:
Journal of Electronic Packaging
Publisher: ASME
Article Type: Research Papers
J. Electron. Packag. June 2011, 133(2): 021007.
Published Online: June 23, 2011
...). That is, the single-crystal phosphor screen of the beam monitor converts the X-ray images into the corresponding visible light images, and the CCD camera then captures the analog images expanded through the microscope objectives. The format of the CCD camera is 2000 × 1312 pixels, and a 14-bit analog-digital...
