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Keywords: X-ray lithography
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. April 2010, 132(4): 041010.
Published Online: February 22, 2010
... substrate by electroforming copper onto a mask patterned by X-ray lithography and sealed by diffusion bonding. Subcooled liquid is electrically heated to the desired quality, followed by condensation in the test section. Downstream of the test section, another electric heater is used to heat the refrigerant...
