Many manufacturing processes, such as lithography, etching, laser, electrical discharge machining (EDM), and electrochemical machining (ECM), are being applied to produce the meso- and microscale parts and products. Materials such as silicon, glass, quartz crystal, and ceramics are being increasingly used in microelectromechanical system (MEMS) devices. Ultrasonic machining (USM) offers an attractive alternative to machine some of the hard and brittle materials. However, the tool wear in micro-ultrasonic machining adversely affects the machining accuracy. Therefore, it is necessary to account for and to compensate the tool wear during machining. This paper reports the feasibility of applying the uniform wear method developed for micro electrical discharge machining and its integration with CAD/CAM to microultrasonic vibration process for generating accurate three-dimensional (3D) microcavities. Experimental results show that the tool shape remains unchanged and the tool wear has been compensated.
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November 2004
Technical Papers
Study of 3D Micro-Ultrasonic Machining
Z. Y. Yu,
e-mail: zyu@unlserve.unl.edu
Z. Y. Yu
Department of Industrial & Management Systems Engineering, University of Nebraska-Lincoln 175 Nebraska Hall, Lincoln, NE 68588-0518
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K. P. Rajurkar,
K. P. Rajurkar
Department of Industrial & Management Systems Engineering, University of Nebraska-Lincoln 175 Nebraska Hall, Lincoln, NE 68588-0518
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A. Tandon
A. Tandon
Department of Industrial & Management Systems Engineering, University of Nebraska-Lincoln 175 Nebraska Hall, Lincoln, NE 68588-0518
Search for other works by this author on:
Z. Y. Yu
Department of Industrial & Management Systems Engineering, University of Nebraska-Lincoln 175 Nebraska Hall, Lincoln, NE 68588-0518
e-mail: zyu@unlserve.unl.edu
K. P. Rajurkar
Department of Industrial & Management Systems Engineering, University of Nebraska-Lincoln 175 Nebraska Hall, Lincoln, NE 68588-0518
A. Tandon
Department of Industrial & Management Systems Engineering, University of Nebraska-Lincoln 175 Nebraska Hall, Lincoln, NE 68588-0518
Contributed by the Manufacturing Engineering Division for publication in the JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING. Manuscript received February 11, 2004; revised September 2, 2004. Associate Editor: K. Dohda.
J. Manuf. Sci. Eng. Nov 2004, 126(4): 727-732 (6 pages)
Published Online: February 4, 2005
Article history
Received:
February 11, 2004
Revised:
September 2, 2004
Online:
February 4, 2005
Citation
Yu, Z. Y., Rajurkar , K. P., and Tandon, A. (February 4, 2005). "Study of 3D Micro-Ultrasonic Machining ." ASME. J. Manuf. Sci. Eng. November 2004; 126(4): 727–732. https://doi.org/10.1115/1.1813482
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