Recent developments in integrated microphotonics have led to unprecedented potential toward robust sensor enhancements for manufacturing systems. These micron-sized subwavelength structured photonic sensors could allow critical thermomechanical phenomena in manufacturing processes to be monitored while offering immunity to electromagnetic interference, resistance to hostile environments, multiplexing capabilities, and high rates of data collection. To implement these novel sensors into real manufacturing processes, the microphotonic sensors can be embedded at critical locations in metallic structures, which are heavily used in hostile manufacturing environments. This paper presents the study of design, fabrication, and characterization of integrated microring sensors. Various thin film optical materials were studied and single ring resonators were designed. A new approach to fabricate metal embedded microring sensors was developed. Metal embedded optical microring temperature sensors were characterized. The factor of the metal embedded microring sensors was measured to be around 2000, while the free spectral range was about . The temperature sensitivity of the metal embedded microring sensor was .
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e-mail: xcli@engr.wisc.edu
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June 2008
Special Section: Micromanufacturing
Design, Fabrication, and Characterization of Metal Embedded Microphotonic Sensors
Xugang Zhang,
Xugang Zhang
Department of Mechanical Engineering,
University of Wisconsin-Madison
, 1513 University Avenue, Madison, WI 53706
Search for other works by this author on:
Hongrui Jiang,
Hongrui Jiang
Department of Electrical and Computer Engineering,
University of Wisconsin-Madison
, 1415 Engineering Drive, Madison, WI 53706
Search for other works by this author on:
Xiaochun Li
Xiaochun Li
Department of Mechanical Engineering,
e-mail: xcli@engr.wisc.edu
University of Wisconsin-Madison
, 1513 University Avenue, Madison, WI 53706
Search for other works by this author on:
Xugang Zhang
Department of Mechanical Engineering,
University of Wisconsin-Madison
, 1513 University Avenue, Madison, WI 53706
Hongrui Jiang
Department of Electrical and Computer Engineering,
University of Wisconsin-Madison
, 1415 Engineering Drive, Madison, WI 53706
Xiaochun Li
Department of Mechanical Engineering,
University of Wisconsin-Madison
, 1513 University Avenue, Madison, WI 53706e-mail: xcli@engr.wisc.edu
J. Manuf. Sci. Eng. Jun 2008, 130(3): 031104 (7 pages)
Published Online: May 5, 2008
Article history
Received:
September 14, 2007
Revised:
January 17, 2008
Published:
May 5, 2008
Citation
Zhang, X., Jiang, H., and Li, X. (May 5, 2008). "Design, Fabrication, and Characterization of Metal Embedded Microphotonic Sensors." ASME. J. Manuf. Sci. Eng. June 2008; 130(3): 031104. https://doi.org/10.1115/1.2917356
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