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Keywords: femtosecond laser micromachining
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Journal Articles
Publisher: ASME
Article Type: Special Section: Micromanufacturing
J. Manuf. Sci. Eng. June 2008, 130(3): 031117.
Published Online: June 3, 2008
...Nitin Uppal; Panos S. Shiakolas Femtosecond laser micromachining (FLM) is a relatively new and promising technology for the micromachining of a wide spectrum of engineering materials with micron and submicron size features. The interaction mechanism of femtosecond laser pulses with matter...