Excimer laser ablation is a versatile technique that can be used for a variety of different materials. Excimer laser ablation overcomes limitations of conventional two-dimensional (2D) microfabrication techniques and facilitates three-dimensional (3D) micromanufacturing. Previously, we have reported a characterization study on 248 nm KrF excimer laser micromachining. This paper extends the study to 193 nm ArF excimer laser micromachining on five representative micro-electro-mechanical systems (MEMS) materials (Si, soda-lime glass, SU-8, polydimethylsiloxane (PDMS), and polyimide). Relations between laser parameters (fluence, frequency and number of laser pulses) and etch performances (etch rates, aspect ratio, and surface quality) were investigated. Etch rate per shot was proportional to laser fluence but inversely proportional to number of laser pulses. Laser frequency did not show a notable impact on etch rates. Aspect ratio was also proportional to laser fluence and number of laser pulses but was not affected by laser frequency. Materials absorbance spectrum was found to have important influence on etch rates. Thermal modeling was conducted as well using numerical simulation to investigate how the photothermal ablation mechanism affects the etching results. Thermal properties of material, primarily thermal conductivity, were proved to have significant influence on etching results. Physical deformation in laser machined sites was also investigated using scanning electron microscopy (SEM) imaging. Element composition of redeposited materials around ablation site was analyzed using energy dispersive x-ray spectroscopy (EDXS) analysis. Combined with our previous report on KrF excimer laser micromachining, this comprehensive characterization study provides guidelines to identify optimized laser ablation parameters for desired microscale structures on MEMS materials. In order to demonstrate the 3D microfabrication capability of ArF excimer laser, cutting and local removal of insulation for a novel floating braided neural probe made of polyimide and nichrome was conducted successfully using the optimized laser ablation parameters obtained in the current study.
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June 2014
This article was originally published in
Journal of Micro and Nano-Manufacturing
Research-Article
ArF Excimer Laser Micromachining of MEMS Materials: Characterization and Applications
Kewei Liu,
Kewei Liu
Mem. ASME
e-mail: liu_kewei@hotmail.com
Lightspeed ADL™ Application Development Lab Resonetics LLC.
,Nashua, NH 03060
e-mail: liu_kewei@hotmail.com
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Yoontae Kim,
Yoontae Kim
Mem. ASME
Mechanical Engineering and Mechanics,
e-mail: yk373@drexel.edu
Mechanical Engineering and Mechanics,
Drexel University
,Philadelphia, PA 19104
e-mail: yk373@drexel.edu
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Hongseok (Moses) Noh
Hongseok (Moses) Noh
1
Mem. ASME
Mechanical Engineering and Mechanics,
e-mail: mosesnoh@coe.drexel.edu
Mechanical Engineering and Mechanics,
Drexel University
,Philadelphia, PA 19104
e-mail: mosesnoh@coe.drexel.edu
1Corresponding author.
Search for other works by this author on:
Kewei Liu
Mem. ASME
e-mail: liu_kewei@hotmail.com
Lightspeed ADL™ Application Development Lab Resonetics LLC.
,Nashua, NH 03060
e-mail: liu_kewei@hotmail.com
Yoontae Kim
Mem. ASME
Mechanical Engineering and Mechanics,
e-mail: yk373@drexel.edu
Mechanical Engineering and Mechanics,
Drexel University
,Philadelphia, PA 19104
e-mail: yk373@drexel.edu
Hongseok (Moses) Noh
Mem. ASME
Mechanical Engineering and Mechanics,
e-mail: mosesnoh@coe.drexel.edu
Mechanical Engineering and Mechanics,
Drexel University
,Philadelphia, PA 19104
e-mail: mosesnoh@coe.drexel.edu
1Corresponding author.
Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received September 9, 2013; final manuscript received February 26, 2014; published online April 11, 2014. Assoc. Editor: Stefan Dimov.
J. Micro Nano-Manuf. Jun 2014, 2(2): 021006 (13 pages)
Published Online: April 11, 2014
Article history
Received:
September 9, 2013
Revision Received:
February 26, 2014
Citation
Liu, K., Kim, Y., and Noh, H. (. (April 11, 2014). "ArF Excimer Laser Micromachining of MEMS Materials: Characterization and Applications." ASME. J. Micro Nano-Manuf. June 2014; 2(2): 021006. https://doi.org/10.1115/1.4027121
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