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Keywords: microfabrication
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Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano Sci. Eng. December 2024, 12(4): 041001.
Paper No: JMNM-24-1019
Published Online: October 11, 2024
...) analysis, signifies the SECEDM process efficiency in microfabrication. Fig. 11 3D views and SEM images of the machined hole surfaces fabricated by ( a ) and ( b ) EDM, ( c ) and ( d ) ECM, and ( e ) and ( f ) SECEDM 3D views and SEM images of the machined hole surfaces fabricated by (a) and (b...
Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2021, 9(1): 010902.
Paper No: JMNM-20-1013
Published Online: February 9, 2021
.... The nonlithographically based microfabrication (NLBM) process is uniquely suited to create high performance nanopositioning architectures which are customizable to the positioning requirements of a range of nanoscale applications. These can significantly reduce the cost of nanomanufacturing research and development...
Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2020, 8(3): 031003.
Paper No: JMNM-19-1080
Published Online: September 9, 2020
.... shape memory alloy bimorph microactuators e-beam evaporation annealing X-ray diffraction differential scanning calorimeter microfabrication NiTi high-precision patterned lift-off 10 12 2019 31 07 2020 09 09 2020 The United States Government retains, and by accepting...
