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Journal Articles

Fabrication of Six Degrees-of-Freedom Hexflex Positioner With Integrated Strain Sensing Using Nonlithographically Based Microfabrication

Robert M. Panas, Martin L. Culpepper
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2021, 9(1): 010902.
Paper No: JMNM-20-1013
https://doi.org/10.1115/1.4049123
Published Online: February 9, 2021
... from one another at the voltage end. e-mail:  panas3@llnl.gov 19 04 2020 04 09 2020 09 02 2021 piezoresistor microfabrication nanopositioner strain gage sensor Schottky diode nonlithographically based microfabrication This work demonstrates...
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Topics: Gages, Manufacturing, Microfabrication, Micromachining, Piezoresistors, Sensors, Silicon, Metals, Etching, Lasers