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Keywords: MEMS
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Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Nanotechnol. Eng. Med. August 2011, 2(3): 034502.
Published Online: January 10, 2012
...S. Sathyanarayanan; A. Vimala Juliet Micromachining technology has greatly benefited from the success of developments in implantable biomedical microdevices. In this paper, microelectromechanical systems (MEMS) capacitive pressure sensor operating for biomedical applications in the range of 20–400...
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Nanotechnol. Eng. Med. November 2010, 1(4): 041003.
Published Online: October 21, 2010
...P. A. Manoharan; D. Nedumaran Design and simulation of MEMS based capacitive sensor with doubly supported serpentine meander structure for millibar pressure applications proposed in this work is analyzed using INTELLISUITE ™ and NISA ™ softwares. In this model, microsensing membrane (MSM...
