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Keywords: PolySi
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Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Nanotechnol. Eng. Med. August 2011, 2(3): 034502.
Published Online: January 10, 2012
... electromechanical effects finite element analysis micromachining pressure sensors capacitive pressure sensor MEMS PolySi sensor Long-term, continuous pressure monitoring is critically needed for a number of applications, including the monitoring of the intra-arterial pressure of patients...
