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Keywords: capacitive sensors
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Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Nanotechnol. Eng. Med. August 2011, 2(3): 034502.
Published Online: January 10, 2012
... Batch Sealed Absolute Capacitive Pressure Sensor ,” J. Sens. Actuators , 95 , pp. 29 – 38. 10.1016/S0924-4247(01)00753-1 13 Chatzandroulis , S. , Tsoukalas , D. , and Neukomm , P. A. , 2000 , “ A Miniature Pressure System With a Capacitive Sensor and a Passive Telemetry Link...
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Nanotechnol. Eng. Med. November 2010, 1(4): 041003.
Published Online: October 21, 2010
...P. A. Manoharan; D. Nedumaran Design and simulation of MEMS based capacitive sensor with doubly supported serpentine meander structure for millibar pressure applications proposed in this work is analyzed using INTELLISUITE ™ and NISA ™ softwares. In this model, microsensing membrane (MSM...
