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Keywords: e-beam lithography
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Nanotechnol. Eng. Med. November 2011, 2(4): 041006.
Published Online: April 4, 2012
... that the thickness of the silane coatings is a critical parameter when using soft lithography to replicate nanoscale features, and caution should be taken on how long a master is exposed to silane vapors. silane soft lithography PDMS PMMA e-beam lithography Soft lithography is a set of fabrication...
