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1-2 of 2
Keywords: micromachining
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Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Nanotechnol. Eng. Med. August 2011, 2(3): 034502.
Published Online: January 10, 2012
...S. Sathyanarayanan; A. Vimala Juliet Micromachining technology has greatly benefited from the success of developments in implantable biomedical microdevices. In this paper, microelectromechanical systems (MEMS) capacitive pressure sensor operating for biomedical applications in the range of 20–400...
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Nanotechnol. Eng. Med. May 2010, 1(2): 021010.
Published Online: May 14, 2010
...Bruce Kim; Haixin Zhu; Jiping He This paper presents a novel structure for a neural sensor using a surface micromachining technique with dry-etch benzocyclobutene selected as the substrate and packaging material. The finished device has intracortical recording sites on both sides and epidural...
