...S. Sathyanarayanan; A. Vimala Juliet Micromachining technology has greatly benefited from the success of developments in implantable biomedical microdevices. In this paper, microelectromechanical systems (MEMS) capacitive pressure sensor operating for biomedical applications in the range of 20–400...

... of pressure load. The spring constant and the effect of fringing field capacitance is evaluated to optimize the design. The key factors of design information for the fabrication of millibar pressure sensor are analyzed. The proposed model discussed in the earlier section is limited to (i) the dynamic...