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Keywords: silane
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Nanotechnol. Eng. Med. November 2011, 2(4): 041006.
Published Online: April 4, 2012
...Lucas H. Ting; Shirin Feghhi; Sangyoon J. Han; Marita L. Rodriguez; Nathan J. Sniadecki Soft lithography was used to replicate nanoscale features made using electron beam lithography on a polymethylmethacrylate (PMMA) master. The PMMA masters were exposed to fluorinated silane vapors to passivate...