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Keywords: CMP
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Journal Articles
Journal:
Journal of Tribology
Publisher: ASME
Article Type: Research Papers
J. Tribol. April 2008, 130(2): 021603.
Published Online: May 7, 2008
.... , and Rajagopalan , R. , 1997 , Principles of Colloid and Surface Chemistry , Dekker , New York . Zhang , F. , and Busnaina , A. , 1999 , “ Submicron Particle Removal in Post-Oxide Chemical-Mechanical Planarization (CMP) Cleaning ,” Appl. Phys. A: Mater. Sci. Process. 0947-8396 10.1007...
