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Keywords: MEMS/NEMS
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Journal Articles

Fatigue at Nanoscale: An Integrated Stiffness and Depth Sensing Approach to Investigate the Mechanisms of Failure in Diamondlike Carbon Film

R. Ahmed, Y. Q. Fu, N. H. Faisal
Journal: Journal of Tribology
Publisher: ASME
Article Type: Micro-Nano Tribology
J. Tribol. January 2012, 134(1): 012001.
https://doi.org/10.1115/1.4005774
Published Online: February 24, 2012
... in contact depth. 29 06 2011 02 01 2012 21 02 2012 24 02 2012 nanofatigue diamondlike carbon film failure adhesion to substrate MEMS/NEMS Nanoscale fatigue test offers the capability to evaluate asperity contacts for macroscale tribological phenomenon and also contact...
View Article titled, Fatigue at Nanoscale: An Integrated Stiffness and Depth Sensing Approach to Investigate the Mechanisms of Failure in Diamondlike Carbon Film
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Topics: Cycles, Failure, Fatigue, Stiffness, Stress, Nanoscale phenomena, Diamond films, Failure mechanisms
Journal Articles

Adhesion and Friction Studies of Silicon and Hydrophobic and Low Friction Films and Investigation of Scale Effects

Bharat Bhushan, Fellow ASME, Huiwen Liu, Stephen M. Hsu
Journal: Journal of Tribology
Publisher: ASME
Article Type: Technical Papers
J. Tribol. July 2004, 126(3): 583–590.
https://doi.org/10.1115/1.1739407
Published Online: June 28, 2004
...Bharat Bhushan, Fellow ASME; Huiwen Liu; Stephen M. Hsu Tribological properties are crucial to the reliability of microelectromechanical systems/nanoelectromechanical systems (MEMS/NEMS). In this study, adhesion and friction measurements are made at micro and nanoscales on single-crystal silicon...
View Article titled, Adhesion and Friction Studies of Silicon and Hydrophobic and Low Friction Films and Investigation of Scale Effects
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Topics: Adhesion, Friction, Silicon, Adhesives